Publication:
Electronic-Photonic Integrated Circuits through Micro-Transfer Printing
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| cris.virtual.orcid | 0000-0001-6608-9990 | |
| cris.virtual.orcid | 0000-0003-2225-0505 | |
| cris.virtual.orcid | 0000-0002-9831-2808 | |
| cris.virtual.orcid | 0000-0002-4903-5170 | |
| cris.virtual.orcid | 0000-0002-4667-5092 | |
| cris.virtual.orcid | 0000-0002-8737-9142 | |
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| cris.virtualsource.orcid | 7897aa7a-0c43-4929-b5ef-9f5606dd37c6 | |
| cris.virtualsource.orcid | 994a7bf6-d671-4e2b-ba43-36033c497bb2 | |
| cris.virtualsource.orcid | fe743bbd-c4bc-4c6b-a1b1-b4147daf8af7 | |
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| cris.virtualsource.orcid | b8cb186a-465d-4076-a4fb-09aa4b16cdaa | |
| dc.contributor.author | Li, He | |
| dc.contributor.author | Pannier, Tinus | |
| dc.contributor.author | Gu, Ye | |
| dc.contributor.author | Loi, Ruggero | |
| dc.contributor.author | Ramaswamy, Prasanna | |
| dc.contributor.author | Steglich, Patrick | |
| dc.contributor.author | Pan, Biwei | |
| dc.contributor.author | Zhang, Jing | |
| dc.contributor.author | Ossieur, Peter | |
| dc.contributor.author | Roelkens, Gunther | |
| dc.date.accessioned | 2026-05-07T11:30:23Z | |
| dc.date.available | 2026-05-07T11:30:23Z | |
| dc.date.createdwos | 2025-09-26 | |
| dc.date.issued | 2025 | |
| dc.description.abstract | We realized low-ohmic, high-speed interconnects to transfer-printed, 20 μm thick electronic chiplets with small (20 μm×20μm) pads. Spray-coated divinylsiloxane-bis-benzocyclobuten (DVS-BCB) ramps were created, onto which a lithographically defined metal redistribution layer including vias was fabricated. This approach facilitates short (low parasitic) interconnects between electronics and photonics. | |
| dc.description.wosFundingText | This work was supported by the Horizon 2020 CALADAN project as well as the UGent GOA project oNoW | |
| dc.identifier.doi | 10.1109/SiPhotonics64386.2025.10984590 | |
| dc.identifier.isbn | 979-8-3315-0619-3 | |
| dc.identifier.issn | 1949-2081 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/59373 | |
| dc.language.iso | eng | |
| dc.provenance.editstepuser | greet.vanhoof@imec.be | |
| dc.publisher | IEEE | |
| dc.source.conference | IEEE Silicon Photonics Conference (SiPhotonics) | |
| dc.source.conferencedate | 2025-04-14 | |
| dc.source.conferencelocation | London | |
| dc.source.journal | 2025 IEEE SILICON PHOTONICS CONFERENCE, SIPHOTONICS | |
| dc.source.numberofpages | 2 | |
| dc.title | Electronic-Photonic Integrated Circuits through Micro-Transfer Printing | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| imec.internal.crawledAt | 2025-10-22 | |
| imec.internal.source | crawler | |
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