3D nanoprinting of beam shaping micro-optics on VCSEL chips integrated on a laser-written glass interposer

Abstract

We present a novel method for integrating Vertical Cavity Surface Emitting Lasers (VCSELs) into fused silica glass, combining precise embedding with the direct laser writing of polymer-based micro-optic elements. Custom-shaped cavities for GaAs-based VCSEL arrays (850nm) are formed via femtosecond laser irradiation and chemical etching. An electrical redistribution layer is created using polyimide coating, excimer laser via-drilling, TiW-Cu sputtering, and photolithographic patterning. Micro-optics for beam focusing are designed, fabricated via two-photon polymerization directly on the integrated VCSELs, and characterized.