Publication:

3D nanoprinting of beam shaping micro-optics on VCSEL chips integrated on a laser-written glass interposer

Date

2025
Proceedings Paper
https://doi.org/10.1117/12.3041119
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dc.contributor.authorKyriazis, Athanasios
dc.contributor.authorGuessoum Salah Eddine
dc.contributor.authorMalica, Tushar
dc.contributor.authorVirte, Martin
dc.contributor.authorVan Erps, Jurgen
dc.contributor.authorVan Steenberge, Geert
dc.contributor.imecauthorKyriazis, Athanasios
dc.contributor.imecauthorGuessoum, Salah Eddine
dc.contributor.imecauthorVan Steenberge, Geert
dc.contributor.orcidimecVan Steenberge, Geert::0000-0001-8574-1235
dc.date.accessioned2025-07-12T03:59:56Z
dc.date.available2025-07-12T03:59:56Z
dc.date.issued2025
dc.description.abstractWe present a novel method for integrating Vertical Cavity Surface Emitting Lasers (VCSELs) into fused silica glass, combining precise embedding with the direct laser writing of polymer-based micro-optic elements. Custom-shaped cavities for GaAs-based VCSEL arrays (850nm) are formed via femtosecond laser irradiation and chemical etching. An electrical redistribution layer is created using polyimide coating, excimer laser via-drilling, TiW-Cu sputtering, and photolithographic patterning. Micro-optics for beam focusing are designed, fabricated via two-photon polymerization directly on the integrated VCSELs, and characterized.
dc.description.wosFundingTextThis work was financially supported by Fonds Wetenschappelijk Onderzoek (G020621N), Interreg (NWE758 "OIP4NWE", "Fotonica Pilootlijnen"); Methusalem Foundation, IOF and OZR of Vrije Universiteit Brussel.
dc.identifier.doi10.1117/12.3041119
dc.identifier.eisbn978-1-5106-8493-5
dc.identifier.isbn978-1-5106-8492-8
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45893
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage133720Q
dc.source.conference2025 Conference on Optical Interconnects and Packaging
dc.source.conferencedate2025-01-25
dc.source.conferencelocationSan Francisco
dc.source.journalOptical Interconnects and Packaging 2025
dc.source.numberofpages7
dc.subject.keywordsMICROFABRICATION
dc.title

3D nanoprinting of beam shaping micro-optics on VCSEL chips integrated on a laser-written glass interposer

dc.typeProceedings paper
dspace.entity.typePublication
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