Publication:
3D nanoprinting of beam shaping micro-optics on VCSEL chips integrated on a laser-written glass interposer
| dc.contributor.author | Kyriazis, Athanasios | |
| dc.contributor.author | Guessoum, Salah Eddine | |
| dc.contributor.author | Malica, Tushar | |
| dc.contributor.author | Virte, Martin | |
| dc.contributor.author | Van Erps, Jurgen | |
| dc.contributor.author | Van Steenberge, Geert | |
| dc.contributor.imecauthor | Kyriazis, Athanasios | |
| dc.contributor.imecauthor | Guessoum, Salah Eddine | |
| dc.contributor.imecauthor | Van Steenberge, Geert | |
| dc.contributor.orcidimec | Van Steenberge, Geert::0000-0001-8574-1235 | |
| dc.date.accessioned | 2025-07-12T03:59:56Z | |
| dc.date.available | 2025-07-12T03:59:56Z | |
| dc.date.issued | 2025 | |
| dc.description.wosFundingText | This work was financially supported by Fonds Wetenschappelijk Onderzoek (G020621N), Interreg (NWE758 "OIP4NWE", "Fotonica Pilootlijnen"); Methusalem Foundation, IOF and OZR of Vrije Universiteit Brussel. | |
| dc.identifier.doi | 10.1117/12.3041119 | |
| dc.identifier.eisbn | 978-1-5106-8493-5 | |
| dc.identifier.isbn | 978-1-5106-8492-8 | |
| dc.identifier.issn | 0277-786X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45893 | |
| dc.publisher | SPIE-INT SOC OPTICAL ENGINEERING | |
| dc.source.conference | 2025 Conference on Optical Interconnects and Packaging | |
| dc.source.conferencedate | JAN 28-31, 2025 | |
| dc.source.conferencelocation | San Francisco | |
| dc.source.numberofpages | 7 | |
| dc.source.volume | 13372 | |
| dc.subject.keywords | MICROFABRICATION | |
| dc.title | 3D nanoprinting of beam shaping micro-optics on VCSEL chips integrated on a laser-written glass interposer | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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