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field evaporation behavior of high-k metal gate stack under femtosecond laser pulsing
Publication:
field evaporation behavior of high-k metal gate stack under femtosecond laser pulsing
Date
2010
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Gilbert, Matthieu
;
Koelling, Sebastian
;
Kambham, Ajay Kumar
;
Vandervorst, Wilfried
Journal
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1911
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-09
Citations
Metrics
Views
1911
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-09
Citations