Publication:
field evaporation behavior of high-k metal gate stack under femtosecond laser pulsing
Date
| dc.contributor.author | Gilbert, Matthieu | |
| dc.contributor.author | Koelling, Sebastian | |
| dc.contributor.author | Kambham, Ajay Kumar | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-18T16:33:37Z | |
| dc.date.available | 2021-10-18T16:33:37Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17150 | |
| dc.source.conference | 52nd International Field Emission Symposium - IFES | |
| dc.source.conferencedate | 5/07/2010 | |
| dc.source.conferencelocation | Sydney Australia | |
| dc.title | field evaporation behavior of high-k metal gate stack under femtosecond laser pulsing | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |