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Barrier and seed layer coverage in 3D structures with different aspect ratios using sputtering and ALD proecesses
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1 since deposited on 2021-10-17
Acq. date: 2026-03-01
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2019 since deposited on 2021-10-17
Acq. date: 2026-03-01
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1 since deposited on 2021-10-17
Acq. date: 2026-03-01
Views
2019 since deposited on 2021-10-17
Acq. date: 2026-03-01
Citations