Publication:

Advanced Ultrathin Spray Coating Process Technology for Heterogeneous Integration Applications

Date

2024
Proceedings Paper
https://doi.org/10.1109/estc60143.2024.10712128
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Published version 1.58 MB

Author(s)

Rimbock, Johanna
;
Ertl, Stefan
;
Ramaswamy, Prasanna
;
Farrell, Alex
;
Uzun, Ali  
;
Pires, Mariana
;
Corbett, Brain
;
Loi, Ruggero
;
Varga, Ksenija
;
Ossieur, Peter  

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