Publication:

Advanced Ultrathin Spray Coating Process Technology for Heterogeneous Integration Applications

Date

2024
Proceedings Paper
https://doi.org/10.1109/ESTC60143.2024.10712128
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dc.contributor.authorRimbock, Johanna
dc.contributor.authorErtl, Stefan
dc.contributor.authorRamaswamy, Prasanna
dc.contributor.authorFarrell, Alex
dc.contributor.authorUzun, Ali
dc.contributor.authorPires, Mariana
dc.contributor.authorCorbett, Brain
dc.contributor.authorLoi, Ruggero
dc.contributor.authorVarga, Ksenija
dc.contributor.authorOssieur, Peter
dc.contributor.imecauthorUzun, Ali
dc.contributor.imecauthorOssieur, Peter
dc.contributor.orcidimecOssieur, Peter::0000-0002-8737-9142
dc.contributor.orcidimecUzun, Ali::0000-0003-4227-7211
dc.date.accessioned2025-04-16T07:28:38Z
dc.date.available2025-02-15T21:13:57Z
dc.date.available2025-02-18T10:27:37Z
dc.date.available2025-04-16T07:28:38Z
dc.date.embargo9999-12-31
dc.date.issued2024
dc.description.wosFundingTextThe presented work was supported by European Union's Horizon 2020 innovation programme (Caladan, no.825453).
dc.identifier.doi10.1109/ESTC60143.2024.10712128
dc.identifier.eisbn979-8-3503-9036-0
dc.identifier.isbn979-8-3503-9037-7
dc.identifier.issn2687-9700
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45209
dc.publisherIEEE
dc.source.conference10th IEEE Electronics System-Integration Technology Conference (ESTC)
dc.source.conferencedateSEP 11-13, 2024
dc.source.conferencelocationBerlin
dc.source.journalN/A
dc.source.numberofpages9
dc.title

Advanced Ultrathin Spray Coating Process Technology for Heterogeneous Integration Applications

dc.typeProceedings paper
dspace.entity.typePublication
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