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Conference contributions
Atomic layer doping of phosphorus and arsenic: experimental and atomistic modeling
Publication:
Atomic layer doping of phosphorus and arsenic: experimental and atomistic modeling
Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Takeuchi, Shotaro
;
Yang, Lijun
;
Nguyen, Duy
;
Loo, Roger
;
Conard, Thierry
;
Pourtois, Geoffrey
;
Vandervorst, Wilfried
;
Caymax, Matty
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1926
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1926
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations