Publication:

LCDU optimization of STT-MRAM 50nm pitch MTJ pillars for process window improvement

Date

2019
Meeting abstract
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39589.pdf 2.86 MB

Author(s)

Pak, Murat  
;
Crotti, Davide  
;
Yasin, Farrukh  
;
Ercken, Monique  
;
Halder, Sandip  
;
De Simone, Danilo  
;
Vanelderen, Pieter  
;
Souriau, Laurent  
;
Hody, Hubert  
;
Kar, Gouri Sankar  

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1981 since deposited on 2021-10-27
Acq. date: 2026-10-13

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1981 since deposited on 2021-10-27
Acq. date: 2026-10-13

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