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CMOS-compatible surface-micromachined test structure for determination of thermal conductivity of thin film materials based on Seebeck effect

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1893 since deposited on 2021-10-18
2last month
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Acq. date: 2026-10-12

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1893 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2026-10-12

Citations