Publication:

Laser thermal anneal of polysilicon channel to boost 3D memory performance

Date

2014
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

27217.pdf 664.69 KB

Author(s)

Lisoni, Judit
;
Arreghini, Antonio  
;
Congedo, Gabriele
;
Toledano Luque, Maria
;
Toqué-Trésonne, Inès
;
Huet, Karim
;
Capogreco, Elena  
;
Liu, Lifang
;
Tan, Chi Lim
;
Degraeve, Robin  
;
Van den Bosch, Geert  
;
Van Houdt, Jan  

Journal

Abstract

Description

Statistics

Downloads

1 since deposited on 2021-10-22
Acq. date: 2026-04-06

Views

1947 since deposited on 2021-10-22
2last month
Acq. date: 2026-04-06

Citations

Statistics

Downloads

1 since deposited on 2021-10-22
Acq. date: 2026-04-06

Views

1947 since deposited on 2021-10-22
2last month
Acq. date: 2026-04-06

Citations