Publication:
Laser thermal anneal of polysilicon channel to boost 3D memory performance
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1 since deposited on 2021-10-22
Acq. date: 2025-10-22
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1942 since deposited on 2021-10-22
Acq. date: 2025-10-22
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1 since deposited on 2021-10-22
Acq. date: 2025-10-22
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1942 since deposited on 2021-10-22
Acq. date: 2025-10-22
Citations