Publication:

Extreme scaled gate dielectrics by using ALD Hf-based composite materials

Date

2009

Meeting abstract

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Files

18999.pdf 41.56 KB

Author(s)

Pierreux, Dieter

;

Machkaoutsan, Vladimir

;

;

;

;

Adelmann, Christoph

;

Van Elshocht, Sven

;

;

Ragnarsson, Lars-Ake

;

Statistics

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Acq. date: 2026-05-17