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Extreme scaled gate dielectrics by using ALD Hf-based composite materials
Publication:
Extreme scaled gate dielectrics by using ALD Hf-based composite materials
Date
2009
Meeting abstract
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18999.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pierreux, Dieter
;
Machkaoutsan, Vladimir
;
Tois, E.
;
Swerts, Johan
;
Schram, Tom
;
Adelmann, Christoph
;
Van Elshocht, Sven
;
Tseng, Joshua
;
Ragnarsson, Lars-Ake
;
Maes, Jan
Journal
Abstract
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Views
1974
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
1974
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations