Publication:

Extreme scaled gate dielectrics by using ALD Hf-based composite materials

Date

2009
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorPierreux, Dieter
dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorTois, E.
dc.contributor.authorSwerts, Johan
dc.contributor.authorSchram, Tom
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorTseng, Joshua
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorMaes, Jan
dc.contributor.imecauthorPierreux, Dieter
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorMaes, Jan
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.date.accessioned2021-10-18T01:43:11Z
dc.date.available2021-10-18T01:43:11Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16019
dc.source.beginpage2037
dc.source.conference216th ECS Meeting
dc.source.conferencedate4/10/2009
dc.source.conferencelocationVienna Austria
dc.title

Extreme scaled gate dielectrics by using ALD Hf-based composite materials

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
18999.pdf
Size:
41.56 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions