Publication:

Advanced CMOS device technologies for 45nm node and below

Date

2007

Journal article

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Files

14421.pdf 451.69 KB

Author(s)

Veloso, Anabela

;

Hoffmann, Thomas

;

;

;

;

Augendre, Emmanuel

;

Kubicek, Stefan

;

Verheyen, Peter

;

Collaert, Nadine

;

Absil, Philippe

;

;

Biesemans, Serge

Journal

Science and Technology of Advanced Materials

Statistics

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