Advanced CMOS device technologies for 45nm node and below

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Author(s)

Veloso, Anabela

;

Hoffmann, Thomas

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;

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Augendre, Emmanuel

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Kubicek, Stefan

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Verheyen, Peter

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Collaert, Nadine

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Absil, Philippe

;

;

Biesemans, Serge

Journal

Science and Technology of Advanced Materials

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1939 since deposited on 2021-10-16

1last month

Acq. date: 2025-12-08