Publication:

Advanced CMOS device technologies for 45nm node and below

Date

2007
Journal article
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cris.virtual.orcid0000-0002-8062-3165
cris.virtual.orcid0000-0002-8245-9442
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dc.contributor.authorVeloso, Anabela
dc.contributor.authorHoffmann, Thomas
dc.contributor.authorLauwers, Anne
dc.contributor.authorYu, HongYu
dc.contributor.authorSeveri, Simone
dc.contributor.authorAugendre, Emmanuel
dc.contributor.authorKubicek, Stefan
dc.contributor.authorVerheyen, Peter
dc.contributor.authorCollaert, Nadine
dc.contributor.authorAbsil, Philippe
dc.contributor.authorJurczak, Gosia
dc.contributor.authorBiesemans, Serge
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.accessioned2021-10-16T21:16:21Z
dc.date.available2021-10-16T21:16:21Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13155
dc.source.beginpage214
dc.source.endpage218
dc.source.issue3
dc.source.journalScience and Technology of Advanced Materials
dc.source.volume8
dc.title

Advanced CMOS device technologies for 45nm node and below

dc.typeJournal article
dspace.entity.typePublication
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