Performance improvement in narrow MuGFETs by gate work function and source/drain implant engineering

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Author(s)

Ferain, Isabella

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Collaert, Nadine

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O'Sullivan, Barry

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Witters, Liesbeth

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Rooyackers, Rita

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Conard, Thierry

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Popovici, Mihaela Ioana

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Van Elshocht, Sven

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De Meyer, Kristin

Journal

Solid-State Electronics

Metrics

1963 since deposited on 2021-10-17

Acq. date: 2025-10-23