Publication:
Performance improvement in narrow MuGFETs by gate work function and source/drain implant engineering
Date
| dc.contributor.author | Ferain, Isabella | |
| dc.contributor.author | Duffy, Ray | |
| dc.contributor.author | Collaert, Nadine | |
| dc.contributor.author | Van Dal, Mark | |
| dc.contributor.author | Pawlak, Bartek | |
| dc.contributor.author | O'Sullivan, Barry | |
| dc.contributor.author | Witters, Liesbeth | |
| dc.contributor.author | Rooyackers, Rita | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | Popovici, Mihaela Ioana | |
| dc.contributor.author | Van Elshocht, Sven | |
| dc.contributor.author | Kaiser, M. | |
| dc.contributor.author | Weemaes, R. | |
| dc.contributor.author | Swerts, Johan | |
| dc.contributor.author | Jurczak, Gosia | |
| dc.contributor.author | Lander, Rob | |
| dc.contributor.author | De Meyer, Kristin | |
| dc.contributor.imecauthor | Collaert, Nadine | |
| dc.contributor.imecauthor | Van Dal, Mark | |
| dc.contributor.imecauthor | Pawlak, Bartek | |
| dc.contributor.imecauthor | O'Sullivan, Barry | |
| dc.contributor.imecauthor | Witters, Liesbeth | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | Popovici, Mihaela Ioana | |
| dc.contributor.imecauthor | Van Elshocht, Sven | |
| dc.contributor.imecauthor | Swerts, Johan | |
| dc.contributor.imecauthor | Jurczak, Gosia | |
| dc.contributor.imecauthor | De Meyer, Kristin | |
| dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
| dc.contributor.orcidimec | O'Sullivan, Barry::0000-0002-9036-8241 | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
| dc.date.accessioned | 2021-10-17T22:11:49Z | |
| dc.date.available | 2021-10-17T22:11:49Z | |
| dc.date.issued | 2009 | |
| dc.identifier.issn | 0038-1101 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15300 | |
| dc.source.beginpage | 760 | |
| dc.source.endpage | 766 | |
| dc.source.issue | 7 | |
| dc.source.journal | Solid-State Electronics | |
| dc.source.volume | 53 | |
| dc.title | Performance improvement in narrow MuGFETs by gate work function and source/drain implant engineering | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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