Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Superior N- and PMOSFET scalability using carbon co-implantation and spike annealing
Publication:
Superior N- and PMOSFET scalability using carbon co-implantation and spike annealing
Date
2007
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Augendre, E.
;
Pawlak, Bartek
;
Kubicek, Stefan
;
Hoffmann, Thomas
;
Chiarella, Thomas
;
Kerner, Christoph
;
Severi, Simone
;
Falepin, Annelies
;
Ramos, Emilio
;
De Keersgieter, An
;
Eyben, Pierre
;
Vanhaeren, Danielle
;
Vandervorst, Wilfried
;
Jurczak, Gosia
;
Absil, Philippe
;
Biesemans, Serge
Journal
Solid-State Electronics
Abstract
Description
Metrics
Views
2021
since deposited on 2021-10-16
463
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
2021
since deposited on 2021-10-16
463
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations