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Study of capping layer impact on reflectivity loss by carbon deposition
Publication:
Study of capping layer impact on reflectivity loss by carbon deposition
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Date
2007
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15458.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Jonckheere, Rik
;
Pollentier, Ivan
;
Lorusso, Gian
;
Goethals, Mieke
;
Ronse, Kurt
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1860
since deposited on 2021-10-16
Acq. date: 2025-12-16
Citations
Metrics
Views
1860
since deposited on 2021-10-16
Acq. date: 2025-12-16
Citations