Publication:
Study of capping layer impact on reflectivity loss by carbon deposition
Date
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0003-3498-5082 | |
| cris.virtual.orcid | 0000-0003-2211-9443 | |
| cris.virtual.orcid | 0000-0003-0803-4267 | |
| cris.virtual.orcid | 0000-0002-4266-6500 | |
| cris.virtualsource.department | 0cddeaa4-4a9c-44ee-a5d6-ba4f3945e8a7 | |
| cris.virtualsource.department | 386aec34-c796-442e-8812-e827cd030994 | |
| cris.virtualsource.department | 987ea135-86ab-40b5-a86e-f94391ccf5fe | |
| cris.virtualsource.department | 82fbecb6-a915-4354-8ca7-fdcb5a3d9f37 | |
| cris.virtualsource.orcid | 0cddeaa4-4a9c-44ee-a5d6-ba4f3945e8a7 | |
| cris.virtualsource.orcid | 386aec34-c796-442e-8812-e827cd030994 | |
| cris.virtualsource.orcid | 987ea135-86ab-40b5-a86e-f94391ccf5fe | |
| cris.virtualsource.orcid | 82fbecb6-a915-4354-8ca7-fdcb5a3d9f37 | |
| dc.contributor.author | Jonckheere, Rik | |
| dc.contributor.author | Pollentier, Ivan | |
| dc.contributor.author | Lorusso, Gian | |
| dc.contributor.author | Goethals, Mieke | |
| dc.contributor.author | Ronse, Kurt | |
| dc.contributor.imecauthor | Jonckheere, Rik | |
| dc.contributor.imecauthor | Pollentier, Ivan | |
| dc.contributor.imecauthor | Lorusso, Gian | |
| dc.contributor.imecauthor | Ronse, Kurt | |
| dc.contributor.orcidimec | Jonckheere, Rik::0000-0003-2211-9443 | |
| dc.contributor.orcidimec | Pollentier, Ivan::0000-0002-4266-6500 | |
| dc.contributor.orcidimec | Ronse, Kurt::0000-0003-0803-4267 | |
| dc.date.accessioned | 2021-10-16T16:59:19Z | |
| dc.date.available | 2021-10-16T16:59:19Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12371 | |
| dc.source.conference | International EUVL Symposium | |
| dc.source.conferencedate | 28/10/2007 | |
| dc.source.conferencelocation | Sapporo Japan | |
| dc.title | Study of capping layer impact on reflectivity loss by carbon deposition | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |