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Monitoring of Trace Molecular Impurities in Clean-Room Air
Publication:
Monitoring of Trace Molecular Impurities in Clean-Room Air
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Date
2023
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kenis, Karine
;
Mertens, Paul
;
Altamirano Sanchez, Efrain
;
Van Ongeval, Joost
;
De Vita, Marie
Journal
Solid State Phenomena; Vol. 346
Abstract
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Views
428
since deposited on 2023-09-04
7
last month
1
last week
Acq. date: 2026-08-11
Citations