Publication:

Study of metal barrier deposition-induced damage to porous low-k materials

Date

2011

Journal article

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Files

23117.pdf 368.49 KB

Author(s)

;

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Baklanov, Mikhaïl

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;

Pantouvaki, Marianna

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;

Van Besien, Els

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Journal

Microelectronic Engineering

Statistics

1860 since deposited on 2021-10-19

2last month

Acq. date: 2026-08-05