Publication:

Study of metal barrier deposition-induced damage to porous low-k materials

Date

2011
Journal article
Simple item page Full metadata Statistics
 
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0002-5174-2229
cris.virtual.orcid0009-0001-0376-866X
cris.virtual.orcid0009-0002-8137-3812
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-3545-3424
cris.virtualsource.departmenta6ef22cb-1da6-4243-939a-284a46e0b05a
cris.virtualsource.departmentdb4eab77-b2c2-4b0a-9f2f-dc463d9fcfab
cris.virtualsource.department9a2aa3b7-9a1d-40a9-b5a4-20d54f7d35b5
cris.virtualsource.department8240383a-58bb-4502-9a50-32f0ac7d494b
cris.virtualsource.department0c41ddf8-651a-4081-a5f1-41a81ff84db7
cris.virtualsource.department5345513e-14d5-47e9-a494-1dda4ed18864
cris.virtualsource.orcida6ef22cb-1da6-4243-939a-284a46e0b05a
cris.virtualsource.orciddb4eab77-b2c2-4b0a-9f2f-dc463d9fcfab
cris.virtualsource.orcid9a2aa3b7-9a1d-40a9-b5a4-20d54f7d35b5
cris.virtualsource.orcid8240383a-58bb-4502-9a50-32f0ac7d494b
cris.virtualsource.orcid0c41ddf8-651a-4081-a5f1-41a81ff84db7
cris.virtualsource.orcid5345513e-14d5-47e9-a494-1dda4ed18864
dc.contributor.authorZhao, Larry
dc.contributor.authorVolders, Henny
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorTokei, Zsolt
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorWilson, Chris
dc.contributor.authorVan Besien, Els
dc.contributor.authorBeyer, Gerald
dc.contributor.authorClaeys, Cor
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.date.accessioned2021-10-19T22:28:14Z
dc.date.available2021-10-19T22:28:14Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20224
dc.source.beginpage3030
dc.source.endpage3034
dc.source.issue9
dc.source.journalMicroelectronic Engineering
dc.source.volume88
dc.title

Study of metal barrier deposition-induced damage to porous low-k materials

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
23117.pdf
Size:
368.49 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles