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Formation of ternary Ni-silicide on relaxed and strained SiGe layers
Publication:
Formation of ternary Ni-silicide on relaxed and strained SiGe layers
Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, Q.T.
;
Buca, D.
;
Lenk, S.
;
Loo, Roger
;
Caymax, Matty
;
Mantl, S.
Journal
Microelectronic Engineering
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1934
since deposited on 2021-10-15
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last month
1
last week
Acq. date: 2025-12-08
Citations
Metrics
Views
1934
since deposited on 2021-10-15
1
last month
1
last week
Acq. date: 2025-12-08
Citations