Publication:
Analytical model and Monte Carlo simulations for phosphorus implantation in germanium including ion channeling
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1888 since deposited on 2021-10-17
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Acq. date: 2026-08-04
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Statistics
Views
1888 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-08-04
Citations