Publication:
Scaling and readiness of underlayers for high-numerical aperture extreme ultraviolet lithography
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Acq. date: 2026-10-12
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479 since deposited on 2023-03-01
25last month
6last week
Acq. date: 2026-10-12
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1414 since deposited on 2023-03-01
Acq. date: 2026-10-12
Citations