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Impact of probe penetration on the electrical characterization of Sub-50 nm profiles
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Impact of probe penetration on the electrical characterization of Sub-50 nm profiles
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Date
2002
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Clarysse, Trudo
;
Vanhaeren, Danielle
;
Vandervorst, Wilfried
Journal
Journal of Vacuum Science & Technology B
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1879
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Acq. date: 2025-12-15
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Views
1879
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-15
Citations