Publication:
Impact of probe penetration on the electrical characterization of Sub-50 nm profiles
Date
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Vanhaeren, Danielle | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vanhaeren, Danielle | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Vanhaeren, Danielle::0000-0001-8624-9533 | |
| dc.date.accessioned | 2021-10-14T21:15:40Z | |
| dc.date.available | 2021-10-14T21:15:40Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6125 | |
| dc.source.beginpage | 459 | |
| dc.source.endpage | 466 | |
| dc.source.issue | 1 | |
| dc.source.journal | Journal of Vacuum Science & Technology B | |
| dc.source.volume | 20 | |
| dc.title | Impact of probe penetration on the electrical characterization of Sub-50 nm profiles | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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