Publication:

Low frequency noise analysis as a diagnostic tool to assess the quality of 0.25 μm Ti-silicided poly-lines

Date

1998
Proceedings Paper
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0009-0003-0048-4359
cris.virtual.orcid0000-0003-3822-5953
cris.virtualsource.department1b54d9e4-912a-4dc0-a326-92ebd53da3ea
cris.virtualsource.department99f46578-0b77-4a3f-b8e5-a6879cd2ea9a
cris.virtualsource.orcid1b54d9e4-912a-4dc0-a326-92ebd53da3ea
cris.virtualsource.orcid99f46578-0b77-4a3f-b8e5-a6879cd2ea9a
dc.contributor.authorVandamme, Ewout
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorLauwers, Anne
dc.contributor.authorVandamme, Lorenz
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorLauwers, Anne
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-01T09:25:14Z
dc.date.available2021-10-01T09:25:14Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3073
dc.source.beginpage925
dc.source.conferenceProceedings of the 9th European Symposium on Reliability of Electron Devices and Failure Physics - ESREF
dc.source.conferencedate5/10/1998
dc.source.conferencelocation
dc.source.endpage929
dc.title

Low frequency noise analysis as a diagnostic tool to assess the quality of 0.25 μm Ti-silicided poly-lines

dc.typeProceedings paper
dspace.entity.typePublication
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