Publication:
Demonstration of an InGaAs gate stack with sufficient PBTI reliability by thermal budget optimization, nitridation, high-k material choice, and interface dipole
Date
Loading...
Journal
Abstract
Description
Metrics
Downloads
55 since deposited on 2021-10-23
Acq. date: 2025-10-22
Views
1930 since deposited on 2021-10-23
Acq. date: 2025-10-22
Citations
Metrics
Downloads
55 since deposited on 2021-10-23
Acq. date: 2025-10-22
Views
1930 since deposited on 2021-10-23
Acq. date: 2025-10-22
Citations