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Challenges on surface conditioning in 3D device architectures: triple-gate FinFETs, gate-all-around lateral and vertical nanowire FETs
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1962 since deposited on 2021-10-24
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Acq. date: 2026-01-09
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1962 since deposited on 2021-10-24
1last month
1last week
Acq. date: 2026-01-09
Citations