Publication:
Energy and angular dependent profiling of thin (0.5 - 2.5 nm) oxide layers
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | De Witte, Hilde | |
| dc.contributor.author | Cooke, G. A. | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.date.accessioned | 2021-10-14T11:50:54Z | |
| dc.date.available | 2021-10-14T11:50:54Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3963 | |
| dc.source.conference | SIMS XII; 5-10 September 1999; Brussel, Belgium. | |
| dc.source.conferencelocation | ||
| dc.title | Energy and angular dependent profiling of thin (0.5 - 2.5 nm) oxide layers | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |