Publication:
Atom-probe-tomographic studies on silicon-based semiconductor devices
Date
| dc.contributor.author | Inoue, Koji | |
| dc.contributor.author | Kambham, Ajay Kumar | |
| dc.contributor.author | Mangelinck, Dominique | |
| dc.contributor.author | Lawrence, Dan | |
| dc.contributor.author | Kelly, Thomas F. | |
| dc.date.accessioned | 2021-10-20T11:48:25Z | |
| dc.date.available | 2021-10-20T11:48:25Z | |
| dc.date.issued | 2012 | |
| dc.identifier.issn | 1551-9295 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20849 | |
| dc.source.beginpage | 38 | |
| dc.source.endpage | 44 | |
| dc.source.issue | 5 | |
| dc.source.journal | Microscopy Today | |
| dc.source.volume | 20 | |
| dc.title | Atom-probe-tomographic studies on silicon-based semiconductor devices | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |