Publication:

Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge2Sb2Te5 and Its Mechanism in Nanopatterns

Date

2024

Journal article

https://doi.org/10.1021/acs.chemmater.4c00286

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Author(s)

;

Gallis, Leonidas

;

Clerix, Jan-Willem

;

van der Veen, Marleen

;

Innocent, Jerome

;

Illiberi, Andrea

;

Givens, Michael

;

;

Delabie, Annelies

Journal

CHEMISTRY OF MATERIALS

Statistics

607 since deposited on 2024-06-23

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Acq. date: 2026-02-24