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Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge2Sb2Te5 and Its Mechanism in Nanopatterns
Publication:
Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge2Sb2Te5 and Its Mechanism in Nanopatterns
Date
2024
Journal article
https://doi.org/10.1021/acs.chemmater.4c00286
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sinha, Jyoti
;
Gallis, Leonidas
;
Clerix, Jan-Willem
;
van der Veen, Marleen
;
Innocent, Jerome
;
Illiberi, Andrea
;
Givens, Michael
;
Nyns, Laura
;
Delabie, Annelies
Journal
CHEMISTRY OF MATERIALS
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602
since deposited on 2024-06-23
Acq. date: 2025-10-23
Citations
Metrics
Views
602
since deposited on 2024-06-23
Acq. date: 2025-10-23
Citations