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Conference contributions
Influence of the Ge concentration in a SiGe matrix on ionisation probability and sputter yield with O2+ beam
Publication:
Influence of the Ge concentration in a SiGe matrix on ionisation probability and sputter yield with O2+ beam
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Date
2003
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Huyghebaert, Cedric
;
Conard, Thierry
;
Brijs, Bert
;
Vandervorst, Wilfried
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Acq. date: 2025-12-16
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Views
1812
since deposited on 2021-10-15
1
last month
Acq. date: 2025-12-16
Citations