Publication:
Influence of the Ge concentration in a SiGe matrix on ionisation probability and sputter yield with O2+ beam
Date
| dc.contributor.author | Huyghebaert, Cedric | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Huyghebaert, Cedric | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Huyghebaert, Cedric::0000-0001-6043-7130 | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.date.accessioned | 2021-10-15T04:57:55Z | |
| dc.date.available | 2021-10-15T04:57:55Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7670 | |
| dc.source.beginpage | 249 | |
| dc.source.conference | International Conference on Secondary Ion Mass Spectrometry - SIMS XIV | |
| dc.source.conferencedate | 14/09/2003 | |
| dc.source.conferencelocation | San Diego, CA USA | |
| dc.title | Influence of the Ge concentration in a SiGe matrix on ionisation probability and sputter yield with O2+ beam | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |