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Scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices
Publication:
Scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices
Date
2003
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Alvarez, David
;
Hartwich, J.
;
Kretz, J.
;
Fouchier, Marc
;
Vandervorst, Wilfried
Journal
Microelectronic Engineering
Abstract
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1934
since deposited on 2021-10-15
Acq. date: 2025-10-27
Citations
Metrics
Views
1934
since deposited on 2021-10-15
Acq. date: 2025-10-27
Citations