Publication:
Scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices
Date
| dc.contributor.author | Alvarez, David | |
| dc.contributor.author | Hartwich, J. | |
| dc.contributor.author | Kretz, J. | |
| dc.contributor.author | Fouchier, Marc | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-15T03:58:47Z | |
| dc.date.available | 2021-10-15T03:58:47Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7133 | |
| dc.source.beginpage | 945 | |
| dc.source.endpage | 950 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 67-68 | |
| dc.title | Scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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