Publication:

Achieving optimum diffraction based overlay performance

Date

2010
Proceedings Paper
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0002-1086-270X
cris.virtualsource.departmentf9ae71b7-6a7c-4af7-9261-89511f8785c1
cris.virtualsource.orcidf9ae71b7-6a7c-4af7-9261-89511f8785c1
dc.contributor.authorLeray, Philippe
dc.contributor.authorLaidler, David
dc.contributor.authorCheng, Shaunee
dc.contributor.authorCoogans, Martyn
dc.contributor.authorFuchs, Andreas
dc.contributor.authorPonomarenko, Mariya
dc.contributor.authorvan der Schaar, Maurits
dc.contributor.authorVanoppen, Peter
dc.contributor.imecauthorLeray, Philippe
dc.contributor.imecauthorLaidler, David
dc.contributor.orcidimecLaidler, David::0000-0003-4055-3366
dc.date.accessioned2021-10-18T18:13:26Z
dc.date.available2021-10-18T18:13:26Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17480
dc.source.beginpage76382B
dc.source.conferenceMetrology, Inspection and Process Control for Microlithography XXIV
dc.source.conferencedate21/02/2010
dc.source.conferencelocationSan Jose, CA USA
dc.title

Achieving optimum diffraction based overlay performance

dc.typeProceedings paper
dspace.entity.typePublication
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