Middle-of-line plasma dry etch challenges for Buried Power Rail integration

Radisic, Dunja; Veloso, Anabela; Gupta, Anshul; Hosseini, Maryam; Wang, Shouhua; Mertens, Hans; Chan, BT; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Lazzarino, Frederic; Dentoni Litta, Eugenio; Horiguchi, Naoto

doi:10.1117/12.2616731

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Middle-of-line plasma dry etch challenges for Buried Power Rail integration

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2616731

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Martinez Alanis, Gerardo Tadeo

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Lazzarino, Frederic

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Dentoni Litta, Eugenio

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Horiguchi, Naoto

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Proceedings of SPIE

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1574 since deposited on 2022-09-08

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Acq. date: 2026-02-24

Middle-of-line plasma dry etch challenges for Buried Power Rail integration

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