Middle-of-line plasma dry etch challenges for Buried Power Rail integration

Radisic, Dunja; Veloso, Anabela; Gupta, Anshul; Hosseini, Maryam; Wang, Shouhua; Mertens, Hans; Chan, BT; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Lazzarino, Frederic; Dentoni Litta, Eugenio; Horiguchi, Naoto

doi:10.1117/12.2616731

Publication:

Middle-of-line plasma dry etch challenges for Buried Power Rail integration

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2616731

Simple item page Full metadata Statistics

Author(s)

;

;

;

;

;

;

;

;

Martinez Alanis, Gerardo Tadeo

;

Lazzarino, Frederic

;

Dentoni Litta, Eugenio

;

Horiguchi, Naoto

Journal

Proceedings of SPIE

Statistics

1578 since deposited on 2022-09-08

3last month

1last week

Acq. date: 2026-08-09

Middle-of-line plasma dry etch challenges for Buried Power Rail integration

Date

Author(s)

Journal

Abstract

Description

Statistics

Views

Citations

Statistics

Views

Citations