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Conference contributions
Probing the metal gate high-k interactions by backside XPS and C-AFM
Publication:
Probing the metal gate high-k interactions by backside XPS and C-AFM
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Date
2011
Proceedings Paper
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23201.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Celano, Umberto
;
Conard, Thierry
;
Hantschel, Thomas
;
Vandervorst, Wilfried
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5
since deposited on 2021-10-19
Acq. date: 2025-12-15
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since deposited on 2021-10-19
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Acq. date: 2025-12-15
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Downloads
5
since deposited on 2021-10-19
Acq. date: 2025-12-15
Views
1874
since deposited on 2021-10-19
3
last month
Acq. date: 2025-12-15
Citations