Publication:
Probing the metal gate high-k interactions by backside XPS and C-AFM
Date
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0002-2856-3847 | |
| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0001-9476-4084 | |
| cris.virtual.orcid | 0000-0002-4298-5851 | |
| cris.virtualsource.department | 02fcd909-5a6a-45eb-bfcd-8e9db5163d50 | |
| cris.virtualsource.department | c04a45aa-af45-4b45-b54e-dd767c676d15 | |
| cris.virtualsource.department | e754b012-c4f4-4d96-8cf4-048fae6e57b3 | |
| cris.virtualsource.department | 6bca2580-fe8c-4b07-87e1-c34fbfbb75ce | |
| cris.virtualsource.orcid | 02fcd909-5a6a-45eb-bfcd-8e9db5163d50 | |
| cris.virtualsource.orcid | c04a45aa-af45-4b45-b54e-dd767c676d15 | |
| cris.virtualsource.orcid | e754b012-c4f4-4d96-8cf4-048fae6e57b3 | |
| cris.virtualsource.orcid | 6bca2580-fe8c-4b07-87e1-c34fbfbb75ce | |
| dc.contributor.author | Celano, Umberto | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | Hantschel, Thomas | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Celano, Umberto | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | Hantschel, Thomas | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Celano, Umberto::0000-0002-2856-3847 | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
| dc.date.accessioned | 2021-10-19T12:43:14Z | |
| dc.date.available | 2021-10-19T12:43:14Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18649 | |
| dc.source.beginpage | 1336-p07-06 | |
| dc.source.conference | Interface Engineering for Post-CMOS Emerging Channel Materials | |
| dc.source.conferencedate | 26/04/2011 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Probing the metal gate high-k interactions by backside XPS and C-AFM | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |