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Dynamic Time Warping for Time Series Data Analysis of STI Etching
Publication:
Dynamic Time Warping for Time Series Data Analysis of STI Etching
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Date
2022-11
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Milenin, Alexey
;
Chan, BT
;
Lazzarino, Frederic
Journal
N/A
Abstract
Description
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944
since deposited on 2022-11-16
Acq. date: 2025-12-17
Citations
Metrics
Views
944
since deposited on 2022-11-16
Acq. date: 2025-12-17
Citations