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Dynamic Time Warping for Time Series Data Analysis of STI Etching

Date

2022-11
Meeting abstract
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dc.contributor.authorMilenin, Alexey
dc.contributor.authorChan, BT
dc.contributor.authorLazzarino, Frederic
dc.contributor.imecauthorMilenin, Alexey
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.orcidimecMilenin, Alexey::0000-0003-0747-0462
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.date.accessioned2024-01-18T10:04:18Z
dc.date.available2022-11-16T08:04:04Z
dc.date.available2024-01-18T10:04:18Z
dc.date.issued2022-11
dc.identifier.issnN/A
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40742
dc.source.conference43rd Symposium on Dry Process - DPS
dc.source.conferencedate24-26 November 2022
dc.source.conferencelocationOsaka
dc.source.journalN/A
dc.source.numberofpages2
dc.subject.disciplineEngineering
dc.subject.keywordsDynamic Time Warping, Time Series Data Analysis, STI Etching
dc.title

Dynamic Time Warping for Time Series Data Analysis of STI Etching

dc.typeMeeting abstract
dspace.entity.typePublication
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