Publication:

Integration of GAA Monolayer MoS2 Nanosheet FETs with Gate First Process for Future 2D CFET Scaling

Date

2024
Proceedings Paper
https://doi.org/10.1109/ESSERC62670.2024.10719449
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Author(s)

Xi, Fengben  
;
Sharma, Himanshu  
;
Wu, Xiangyu  
;
Schram, Tom  
;
Conlon, Daire
;
Grubbs, Robert K.  
;
Kumar, Pawan  
;
Ngo, Tien Dat  
;
Ghosh, Souvik  
;
Han, Fei  
;
van Dorp, Dennis  
;
Verreck, Devin  
;
Sutar, Surajit  
;
Smets, Quentin  
;
Lin, Dennis  
;
Banerjee, Kaustuv  
;
Lockhart de la Rosa, Cesar Javier  
;
Goux, Ludovic  
;
Kar, Gouri Sankar  

Journal

N/A

Abstract

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