Publication:

Multi-Vt Gate Stack Technologies for Nanosheet and CFET Devices

Date

2024

Proceedings Paper

https://doi.org/10.1109/SNW63608.2024.10639201

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Author(s)

Arimura, Hiroaki

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;

Ragnarsson, Lars-Ake

;

Vandooren, Anne

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;

;

Conard, Thierry

;

Verni, G. Alessio

;

;

;

;

Horiguchi, Naoto

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360 since deposited on 2024-10-27

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Acq. date: 2026-02-24