Publication:

EUV DRAM Patterning Historic Overview and Future Assumption

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3052340

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Author(s)

;

;

Pham, Van Tuong

;

Miyaguchi, Kenichi

;

Niroomand, Ardavan

;

Verstraete, Lander

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Gillijns, Werner

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Das, Shubhankar

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;

;

;

Sherazi, Yasser

;

Trivkovic, Darko

;

Vanelderen, Pieter

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;

;

Kim, Ryan Ryoung Han

Journal

Proceedings of SPIE

Statistics

54 since deposited on 2025-07-31

Acq. date: 2026-06-23