Publication:
Line edge roughness and critical dimension variation: Fractal characterization and comparison using model functions
Date
| dc.contributor.author | Constantoudis, V. | |
| dc.contributor.author | Patsis, G.P. | |
| dc.contributor.author | Leunissen, Peter | |
| dc.contributor.author | Gogolides, E. | |
| dc.date.accessioned | 2021-10-15T12:56:24Z | |
| dc.date.available | 2021-10-15T12:56:24Z | |
| dc.date.issued | 2004-08 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8718 | |
| dc.source.beginpage | 1974 | |
| dc.source.endpage | 1981 | |
| dc.source.issue | 4 | |
| dc.source.journal | Journal of Vacuum Science and Technology B | |
| dc.source.volume | 22 | |
| dc.title | Line edge roughness and critical dimension variation: Fractal characterization and comparison using model functions | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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