Publication:
Multitechnique characterisation of Al203 thin layers deposited on SiO2/Si surface by atomic layer chemical vapour deposition
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1968 since deposited on 2021-10-15
2last month
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Acq. date: 2026-01-07
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Views
1968 since deposited on 2021-10-15
2last month
2last week
Acq. date: 2026-01-07
Citations