Publication:
Multitechnique characterisation of Al203 thin layers deposited on SiO2/Si surface by atomic layer chemical vapour deposition
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1965 since deposited on 2021-10-15
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Acq. date: 2025-10-25
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Metrics
Views
1965 since deposited on 2021-10-15
413item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations